Micro/Nano Robotics and Automation technologies have rapidly grown associated with the growth of Micro and Nanotechnologies. This book presents a summary of fundamentals in micro-nano scale engineering and the current state of the art of these technologies. “Micro-Nanorobotic Manipulation Systems and their Applications” introduces these advanced technologies from the basics and applications aspects of Micro/Nano-Robotics and Automation from the prospective micro/nano-scale manipulation. The book is organized in 9 chapters including an overview chapter of Micro/Nanorobotics and Automation technology from the historical view and important related research works. Further chapters are devoted to the physics of micro-nano fields as well as to material and science, microscopes, fabrication technology, importance of biological cell, and control techniques. Furthermore important examples, applications and a concise summary of Micro-Nanorobotics and Automation technologies are given.