This groundbreaking book provides professionals with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectro-mechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, practitioners find extensive coverage of these devices at both the technology and application levels. This practical reference helps engineers:Design, fabricate, and characterize FBARs, MEMS, and NEMS;Integrate these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies;Apply FBARs, MEMS, and NEMS to sensing and RF systems;Understand the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices.