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Silicon VLSI Technology: Fundamentals, Practice, and Modeling / Edition 1
Silicon VLSI Technology: Fundamentals, Practice, and Modeling / Edition 1
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For one-quarter/semester, senior/graduate level courses in Fabrication Processes.
Unique in approach, this text provides an
view of silicon technology—with an emphasis on modern computer
It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies.