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Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines
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Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines
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The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.